For developing a new cutting solution for vegetation management that is safer, less energy intensive and more durable, JAK-Metalli has been nominated for the Swedish Steel Prize 2018.
10nm pattern generation using thermal scanning probe lithography enabled by simplified materials and processes
Thermal scanning probe lithography (tSPL) has been used to create patterns with sub-20 nm half pitch resolution. Pattern generation uses a thermally sensitive resist and spin coatable hard mask materials to transfer the resist patterns. Spin coatable materials permit users of tSPL to reduce time and cost of the patterning process.